This document specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic aberration of white light. Additional metrological characteristics can be found in ISO 25178-600. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
PUBLISHED
SSH EN ISO 25178-602:2010
IN_DEVELOPMENT
prSSH EN ISO 25178-602:2025
40.60
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May 11, 2026