prSSH EN IEC 62276:2025

Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods

Scope

IEC 62276:2025 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.

This edition includes the following significant technical changes with respect to the previous edition:

a) The terms and definitions, the technical requirements, sampling frequency, test methods and measurement of transmittance, lightness, colour difference for LN and LT have been added in order to meet the needs of industry development;

b) The term “inclusion” (mentioned in 4.13 and 6.10) and its definition have been added because there was no definition for it in Clause 3;

c) The specification of LTV and PLTV, and the corresponding description of sampling frequency for LN and LT have been added, because they are the key performance parameters for the wafers;

d) The tolerance of Curie temperature specification for LN and LT have been added in order to meet the development requirements of the industry;

e) Measurement of thickness, TV5, TTV, LTV and PLTV have been completed, including measurement principle and method of thickness, TV5, TTV, LTV and PLTV.