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SSH EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)

Dec 12, 2025

General information

60.60     Dec 12, 2025

95.99   

DPS

DPS/KT 133

European Norm

17.020  

English  

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Scope

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

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PUBLISHED
SSH EN ISO 23131:2022
60.60 Standard published
Dec 12, 2025

Related project

Adopted from EN ISO 23131:2022 IDENTICAL

Adopted from ISO 23131:2021 IDENTICAL