SSH ISO 19606:2017

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy

Publication date: Mar 28, 2019

General information

Current stage: 60.60 Effective date: Jan 23, 2019

Originator: DPS

Owner: DPS/KT 67

Type: Pure national standard

ICS: 81.060.30

Languages: English

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Status: Published

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This document describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.

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PUBLISHED
SSH ISO 19606:2017
60.60 Standard published
Jan 23, 2019