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SSH EN 60204-33:2011

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Sep 30, 2011

General information

60.60     Sep 30, 2011

DPS

DPS/KT 6

European Norm

13.110     25.040.30     29.020  

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Scope

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Related directives

Directives related to this standards.

2006/42/EC

Directive 2006/42/EC of the European Parliament and of the Council of 17 May 2006 on machinery, and amending Directive 95/16/EC (recast)

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PUBLISHED
SSH EN 60204-33:2011
60.60 Standard published
Sep 30, 2011

Related project

Adopted from EN 60204-33:2011

Adopted from IEC 60204-33 Ed. 1.0 b

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