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Semiconductor devices - Micro-electromechanical devices - Part 45: Silicon based MEMS fabrication technology - Measurement method of impact resistance of nanostructures
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
60.60 Standard published
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 5: RF MEMS switches
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 50: MEMS capacitive microphones
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
60.60 Standard published
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
60.60 Standard published
Corrigendum 1 - Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
60.60 Standard published
Electricity metering - Data exchange for meter reading, tariff and load control - Glossary of terms - Part 1: Terms related to data exchange with metering equipment using DLMS/COSEM
60.60 Standard published
Corrigendum 1 - Electricity metering - Data exchange for meter reading, tariff and load control - Glossary of terms - Part 1: Terms related to data exchange with metering equipment using DLMS/COSEM
60.60 Standard published
Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment
60.60 Standard published
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